Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modelin
![Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modeling, and Experiment | Semantic Scholar Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modeling, and Experiment | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/6d519a329039a90ad29b863f696392f1caa41bec/6-Figure8-1.png)
Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modeling, and Experiment | Semantic Scholar
![CD uniformity over the image field (range) versus focus for 0.25 µm... | Download Scientific Diagram CD uniformity over the image field (range) versus focus for 0.25 µm... | Download Scientific Diagram](https://www.researchgate.net/publication/267979085/figure/fig6/AS:669495924379672@1536631675761/CD-uniformity-over-the-image-field-range-versus-focus-for-025-m-dense-lines-for.png)
CD uniformity over the image field (range) versus focus for 0.25 µm... | Download Scientific Diagram
![Global ASI CD uniformity comparison between n&k R-T Scatterometer and... | Download Scientific Diagram Global ASI CD uniformity comparison between n&k R-T Scatterometer and... | Download Scientific Diagram](https://www.researchgate.net/publication/253237873/figure/fig4/AS:393190118051846@1470755237540/Global-ASI-CD-uniformity-comparison-between-n-k-R-T-Scatterometer-and-CD-SEM.png)
Global ASI CD uniformity comparison between n&k R-T Scatterometer and... | Download Scientific Diagram
![Extreme ultraviolet lithography reticle local CD uniformity correlation to wafer local CD uniformity Extreme ultraviolet lithography reticle local CD uniformity correlation to wafer local CD uniformity](https://www.spiedigitallibrary.org/ContentImages/Proceedings/12293/122930M/FigureImages/00052_PSISDG12293_122930M_page_9_2.jpg)
Extreme ultraviolet lithography reticle local CD uniformity correlation to wafer local CD uniformity
![Global CD uniformity measurement based on 64 points on a test mask.... | Download Scientific Diagram Global CD uniformity measurement based on 64 points on a test mask.... | Download Scientific Diagram](https://www.researchgate.net/publication/228680594/figure/fig1/AS:301985854181390@1449010446804/Global-CD-uniformity-measurement-based-on-64-points-on-a-test-mask-Settings-l-193nm.png)
Global CD uniformity measurement based on 64 points on a test mask.... | Download Scientific Diagram
![Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modeling, and Experiment | Semantic Scholar Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modeling, and Experiment | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/6d519a329039a90ad29b863f696392f1caa41bec/9-Figure13-1.png)
Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modeling, and Experiment | Semantic Scholar
![Global CD uniformity measurement based on 15 points on a reticle. 5 The... | Download Scientific Diagram Global CD uniformity measurement based on 15 points on a reticle. 5 The... | Download Scientific Diagram](https://www.researchgate.net/publication/228765100/figure/fig1/AS:393697448480782@1470876194585/Global-CD-uniformity-measurement-based-on-15-points-on-a-reticle-5-The-upper-left-image.png)
Global CD uniformity measurement based on 15 points on a reticle. 5 The... | Download Scientific Diagram
![Improvement in photomask critical dimension uniformity using etch selectivity control - ScienceDirect Improvement in photomask critical dimension uniformity using etch selectivity control - ScienceDirect](https://ars.els-cdn.com/content/image/1-s2.0-S0042207X15301007-gr1.jpg)
Improvement in photomask critical dimension uniformity using etch selectivity control - ScienceDirect
![CD uniformity at pitch 80nm after a/litho and b/etch for negative tone... | Download Scientific Diagram CD uniformity at pitch 80nm after a/litho and b/etch for negative tone... | Download Scientific Diagram](https://www.researchgate.net/publication/252117794/figure/fig9/AS:647164170620946@1531307370429/CD-uniformity-at-pitch-80nm-after-a-litho-and-b-etch-for-negative-tone-development.png)